Advanced Materials and Technologies for Micro /Nano-Devices, Sensors and Actuators

Dordrecht : Springer Netherlands, 2010

Abstract/Sommario: Preface. MEMS/NEMS Technologies And Applications. History of Early Research on MEMS in Russia (U.S.S.R.) -- Challenges of Complete CMOS/MEMS Systems Integration -- MEMS for Practical Applications -- Nanochip: A MEMS-Based Ultra-High Data Density Memory Service -- Low Cost Silicon Coriolis’ Gyroscope Paves the way to Consumer IMU -- Microwave and Millimetre Wave Devices Based on Micromachining of Ill-V Semiconductors -- Monocrystalline-Silicon Microwave MEMS Devices Multi-Stable Switche ...; [leggi tutto] Preface. MEMS/NEMS Technologies And Applications. History of Early Research on MEMS in Russia (U.S.S.R.) -- Challenges of Complete CMOS/MEMS Systems Integration -- MEMS for Practical Applications -- Nanochip: A MEMS-Based Ultra-High Data Density Memory Service -- Low Cost Silicon Coriolis’ Gyroscope Paves the way to Consumer IMU -- Microwave and Millimetre Wave Devices Based on Micromachining of Ill-V Semiconductors -- Monocrystalline-Silicon Microwave MEMS Devices Multi-Stable Switches, W-Band Phase Shifters, and MEMS Tuneable Frequency-Selective Surfaces -- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites -- MEMS Device And Reliability Physics. Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams -- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS -- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches -- Advanced Processes And Materials. Development of DRIE for the Next Generation of MEMS Devices -- Low-Temperature Processes for MEMS Device Fabrication -- High Temperature Stable Au/Sn and Cu/Sn Interconnects for 3D Stacked Applications -- 3D integration of MEMS and IC: Design, Technology and Simulations -- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices -- Modeling of Dry Etching in Production of MEMS -- XRD and Raman Study of Low Temperature AlGaAs/GaAs(100) Heterostructures -- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys -- Sensors. Smart Sensors: Advantages and Pitfalls.-Vertically Integrated MEMS SOl Composite Porous Silicon-Crystalline Silicon Cantilever-Array - Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents -- Integration of Diverse Biological Materials in Micro/Nano Devices.-Force Sensing Optimization and Applications -- Using Parametric Resonance to Improve Micro Gyroscope Robustness -- Subject Index. Authors Index. - The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies [comprimi]

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Campo	Valore
Descrizione	Advanced Materials and Technologies for Micro /Nano-Devices, Sensors and Actuators / edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. - Dordrecht : Springer Netherlands, 2010. - IX, 313p ; digital. - (NATO Science for Peace and Security Series B : Physics and Biophysics)
Specifiche	[Supporto spec. Risorsa elettr.] Risorsa remota
Note	Proceedings of the NATO Advanced Research Worskhop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators St. Petersburg, Russia 29 June - 2 July 2008. - Springer eBooks. - Printed edition: 9789048138050
Collezione	[Fa parte di] NATO Science for Peace and Security Series [Vai al dettaglio]
Autori	Gusev, Evgeni - [Responsabilità principale] Dideikin, Arthur - [Responsabilità secondaria] Garfunkel, Eric - [Responsabilità secondaria] SpringerLink (Online service) - [Responsabilità secondaria]
Soggetto	Chemistry Engineering Mechanical engineering Mechanics Microengineering Microreactors Microwaves Microwaves, RF and Optical Engineering Nanotechnology and Microengineering
Classificazione	660.6
Lingua	Inglese
Numeri	ISBN: 978-90-481-3807-4 DOI: 10.1007/978-90-481-3807-4 N. catalogo straniero: TP248.13-248.65 (Library of Congress Call Number)
ID scheda	130296
Permalink	https://www.opac.inaf.it/?ids=130296